Areas of Plasma Application

12.

USC Particle Remover

  • - It is applied to the removal process for tool particles generated during the smart phone manufacturing process
USC Particle Remover

USC Particle Remover / USC-TS Series

  1. 1. The module that removes fine particles that are smaller than 1 micron generated in the touch panel lamination, and display panel and module assembly processes, and micron-sized particles generated in the process of driving equipment
  2. 2. Effective removal of various particles (1 to 100μm) with Double Ultrasonic Air Flow and Triple Suction (removal performance is higher than other companies)
  3. 3. Relatively compact module size, which makes it easy to install and maintain
  4. 4. Patent application for the related technology complete (application number: Korea 10-2020-0007121, and USA 16790447)

Specification

USC-TS

USC-TS
MODEL Cleaning Area W[mm] D[mm] H[mm] Dust Collector
USC-TS100 100 100 140 107 LC-50
USC-TS200 200 100 240 107 LC-100
USC-TS300 300 100 340 107 LC-100
USC-TS400 400 100 440 107 LC-200
USC-TS500 500 100 540 107 LC-200
USC-TS600 600 100 640 107 LC-200

Dust Collector Module

Dust Collector Module
MODEL Air volume [CMM] Static pressure [mmAq] Output [kW] W[mm] D[mm] H[mm]
LC-50 7 210 0.55 512.5 522 773
LC-100 12 230 0.75 740 692 1013
LC-200 30 230 1.5 740 692 1298
Brochure Movement